Robotic Microassembly of 40 Microns Silicon Parts

Robotic microassembly is a high stake to improve microsystems (MEMS) functionalities and modularity. The video shows a microassembly of 40×40 microns silicon parts. Piezoelectric microgripper has 4 Degree Of Freedom (DOF) – 2 for each fingers – and is placed on a 6 Degree Of Freedom (DOF) microrobot. Microgripper is used to handle the object, and to perform microassembly.